Features
- Ultra-fast sampling speed of 10 kHz
- High repeatability of 0.02 μm
- High linear accuracy of ±0.02% of F.S
- Large measuring Angle of ±65°
Technical Specifications
| Reference distance | 0.39 in 10 mm) |
| Measuring range | ±0.0079 in (±0.2 mm) |
| Spot diameter | 7 μm |
| Measuring Angle | ±43° |
| Static noise | 12 nm |
| Linear error | <±0.12 μm |
| Lateral resolution | 3.5 μm |
| Minimum measurable thickness | 5% of Full Scale |
| Temperature characteristic | <0.03% of Full Scale per degree Celsius |
| Diameter | 1.57 x 3.91 in (40 mm x 99.4 mm) |
